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MP SYSTEMS, LLC - Connecting Business With Technology

Nano-Technology

Organic Light Emitting Diode Displays

Semiconductor Chemicals

Semiconductor Equipment

Successes

The Team

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Advantages of the SO3 Gas Cleaning Process
Applications for SO3 Gas Cleaning

Batch Processing with SO3
Biographical Sketches of the Team

Capability of the SO3 Gas Cleaning Process
Compare SO3 Cleaning with a Conventional Strip/Clean Process
Consulting
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Cost of Ownership of the SO3 Gas Cleaning Process

Environmental Safety of SO3 Gas

Description of the SO3 Gas Cleaning Process

Equipment Consulting

High Dose Ion Implant Cleaning with the SO3 Gas Process

Ion Implant (high dose) Cleaning with the SO3 Gas Process

Legal Information
Low-k Dielectric Compatibility with SO3
Low Temperature Stripping with SO3

Metal-Etch Cleaning with the SO3 Gas Process
MP Systems LLC - Consulting Successes

Nanotechnology Consulting

OLED Consulting
Operating Costs of the SO3 Process
Oxide-Etch Cleaning with the SO3 Gas Process

Plasma Damage with the SO3 Process
Post-Ion Implant Cleaning (High Dose) with the SO3 Gas Process
Post-Metal Etch Cleaning with the SO3 Gas Process
Post-Oxide Etch Cleaning with the SO3 Gas Process
Process Flow Schematic for SO3

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Semiconductor Chemicals Consulting
Semiconductor Equipment Consulting
SO3 Gas Cleaning Process
Successes
Sulfur Trioxide Cleaning Process

The Team
Temperature of SO3 Processing

Value Advantages of the SO3 Process

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MP SYSTEMS, LLC., P.O. Box 3746, Los Altos, CA 94024
Phone: 650-967-5125
Email: mpsystems@pacbell.net